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| Semiconductor Gases & Properties |
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| Semiconductor Gases & Properties |
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TYPE
|
GAS
|
SYNONYM
|
FORMULA
|
CLASS
|
VP
@20 C
|
HEAT TRACING
|
WEIGH SCALES
|
VENTURI
|
|
Silicon Precursor
|
Dichlorosilane
|
DCS
|
SiH2Cl2
|
F+, T, C
|
1.6
|
R
|
R
|
R
|
|
|
Disilane
|
Silicon Hexahydride
|
Si2H6
|
F+
|
2.3
|
R
|
R
|
|
|
|
Germane
|
Germanium Hydride
|
GeH4
|
F+, T+
|
n/a
|
|
|
R
|
|
|
Germanium Tetrafluoride
|
Tetrafluorogermane
|
GeF4
|
T, C
|
4.04
|
|
R
|
R
|
|
|
Methyl Silane
|
Monomethylsilane
|
CH3SiH3
|
F+
|
13
|
|
R
|
|
|
|
Silane
|
Silicon Hydride
|
SiH4
|
F+, P
|
n/a
|
|
|
R
|
|
|
Silicon Tetrachloride
|
Tetrachlorosilane
|
SiCl4
|
C
|
0.2
|
R
|
R
|
R
|
|
|
Silicon Tetrafluoride
|
Tetrafluorosilane
|
SiF4
|
T, C
|
n/a
|
|
|
R
|
|
|
Trichlorosilane
|
TCS
|
SiHCl3
|
F, T, C
|
0.6
|
R
|
R
|
R
|
|
Dopant
|
Arsine
|
|
AsH3
|
F+, T+
|
15
|
|
R
|
R
|
|
|
Boron Trifluoride
|
Trifluoroborane
|
BF3
|
T, C
|
2.2
|
R
|
R
|
R
|
|
|
Boron-11 Trifluoride
|
|
11BF3
|
T, C
|
2.2
|
R
|
R
|
R
|
|
|
Diborane
|
Diboron Hexahydride
|
B2H6
|
F+, T+
|
n/a
|
|
|
R
|
|
|
Phosphine
|
Phosphorus Hydride
|
PH3
|
F+, T+
|
34.6
|
|
R
|
R
|
|
|
Trimethylboron
|
TMB
|
B(CH3)3
|
T, F
|
4.1
|
|
R
|
R
|
|
Etchant
|
Boron Trichloride
|
|
BCl3
|
T, C
|
1.6
|
R
|
R
|
R
|
|
|
Chlorine
|
|
Cl2
|
O, T, C
|
6.8
|
|
R
|
R
|
|
|
Chlorine Trifluoride
|
|
ClF3
|
O, T, C
|
1.5
|
R
|
R
|
R
|
|
|
Halocarbon 14
|
Tetrafluoromethane Carbon Tetrafluoride
|
CF4
|
NONE
|
n/a
|
|
|
|
|
|
|
|
Halocarbon 23
|
Trifluoromethane
|
CHF3
|
NONE
|
41.6
|
|
R
|
|
|
|
Halocarbon 32
|
Difluoromethane
|
CH2F2
|
F
|
14.2
|
|
R
|
|
|
|
Halocarbon 41
|
Methyl Fluoride
|
CH3F
|
F
|
3.81
|
|
R
|
|
|
|
Halocarbon 116
|
Hexafluoroethane
|
C2F6
|
NONE
|
30
|
|
R
|
|
|
|
Halocarbon 125
|
Pentafluoroethane
|
C2HF5
|
NONE
|
10.5
|
|
R
|
|
|
|
Halocarbon 218
|
Perfluoropropane
|
C3F8
|
NONE
|
7.7
|
|
R
|
|
|
|
Halocarbon C318
|
Octafluorocyclobutane
|
C4F8
|
NONE
|
2.7
|
R
|
R
|
|
|
|
Hydrogen Bromide
|
|
HBr
|
T, C
|
21
|
|
R
|
R
|
|
|
Hydrogen Chloride
|
|
HCl
|
T, C
|
21
|
|
R
|
R
|
|
|
Hydrogen Fluoride
|
|
HF
|
T+, C
|
1
|
R
|
R
|
R
|
|
|
Nitrogen Trifluoride
|
|
NF3
|
O, Xn
|
n/a
|
|
|
R
|
|
|
Sulphur Hexafluoride
|
|
SF6
|
NONE
|
21
|
|
R
|
|
|
Etchant (Laser)
|
1% Fluoride, 1.25% Krypton bal Neon
|
|
1% F2, 1.25% Kr, Bal Ne
|
O, T, C
|
n/a
|
|
|
R
|
|
|
|
|
1.2% Krypton, bal Neon
|
|
1.2% Kr, Bal Ne
|
NONE
|
n/a
|
|
|
R
|
|
|
|
Atmospherics
|
Argon
|
|
Ar
|
NONE
|
n/a
|
|
|
|
|
|
Helium
|
|
He
|
NONE
|
n/a
|
|
|
|
|
|
Hydrogen
|
|
H2
|
F+
|
n/a
|
|
|
|
|
|
Nitrogen
|
|
N2
|
NONE
|
n/a
|
|
|
|
|
|
Oxygen
|
|
O2
|
O
|
n/a
|
|
|
|
|
|
Xenon
|
|
Xe
|
NONE
|
n/a
|
|
|
|
|
Reactants
|
Ammonia
|
|
NH3
|
T, C
|
8.6
|
|
R
|
R
|
|
|
Carbon Dioxide
|
|
CO2
|
NONE
|
57.3
|
|
R
|
|
|
|
Carbon Monoxide
|
|
CO
|
F+, T
|
n/a
|
|
|
|
|
|
Nitrous Oxide
|
|
N2O
|
O
|
50.8
|
|
R
|
|
|
|
Sulphur Dioxide
|
|
SO2
|
T, C
|
3.3
|
|
R
|
R
|
|
|
Tungsten Hexafluoride
|
|
WF6
|
T+, C
|
1.1
|
R
|
R
|
R
|
|
|
To download a PDF of the Semiconductor Gases & Properties section (82 kb)
please click on the PDF icon - >
|
|
|
|
|
