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FTI can supply a wide array of gas handling components used exclusively for semiconductor wafer fabrication.
Pressure regulators, valves, check valves and a variety of flow devices are available for applications ranging from the source cylinder cabinet, bulk delivery systems through point of use including VMB distribution boxes and process tool gas trays. Products can be tailored for specific needs with custom fittings, dimensions, porting or testing with an option of multi-port, monoblock and surface mount configurations.
Please contact us to discuss your specific requirements.
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