“Metal Diaphragm Relief Valve” is an adjustable Ultra-Clean Relief Valve without any lubrication on O-rings. All specifications are similar to Motoyama UCV.
To download a PDF of the Ham-Let HMS Pressure Relief Ultra Clean Valves section (45 kb)
please click on the PDF icon - >
To download a PDF of the Ham-Let HMS Pressure Relief Ultra Clean Valves section (45 kb)
please click on the PDF icon - >