Surface-mount models from the Ultra Clean Valve specifications made to UHP specifications. Ready for SEMI PR3.1 1.125" C seal connections. These valves implement Cv0.27 for their compact designs.
To download a PDF of the Ham-Let HMS Hybrid Ultra Clean Valves section (46.2 kb)
please click on the PDF icon - >
To download a PDF of the Ham-Let HMS Hybrid Ultra Clean Valves section (46.2 kb)
please click on the PDF icon - >
